Microsystems Engineering
This course will introduce students to the interdisciplinary skills required to design and apply microsystems, will examine some current commercial microsystems application and will consider future possibilities for the technology. It can be taken by students from different technical backgrounds and introduces a technology which is predicted to find applications in many technical domains.
General information:
- Microsystems Engineering module is available in second semester 2011/2012 academic year, starting from February 2012
- Host Institution: Cork Institute of Technology, Department of Electronic Engineering
- Delivery mode:
- Mixed mode via remote delivery: online lectures delivered through the ICGEE VLE (Virtual Learning Environment) combined with 2 days on-site laboratory activities (workshop on-site CIT & Tyndall National Institute)
Course content:
- Introduction to Microsystems: Description of the design, fabrication and application of microsystems. The current and emerging business markets for microsystem technology.
- Specification and Design: System level specification of suitable components and technologies for real-world applications. Layout of ICs and MEMS components.
- Modelling and Design: Electrical, thermal and mechanical modelling and design of microtechnology components and sensors. Combined sensor and interface modelling.
- Fabrication: IC fabrication processes and industry. Microsystems fabrication options. Integration issues.
- Microsystem testing: Characterisation of MEMS system performance using FEM modelling combined with electrical, optical and thermal test equipment.
- Case Studies: Perform case studies in microelectromechanical systems engineering. Describe, model and characterise components with a comparison of system level specifications with modelled and measured performance.
Microsystems Engineering - Module Descriptor
Lecturer: Dr. Martin Hill
Deptartment of Electronic Engineering
Cork Institute of Technology
Martin Hill received a B.E. in electrical engineering from University College Cork in 1987 and an M.Eng.Sc in photovoltaics from the National Microelectronics Research Centre (NMRC) in University College Cork in 1989. He has held a number of posts in private and public research organisations and was Senior Research Scientist in NMRC, leading MEMS research, prior to taking a lecturing post in Cork Institute of Technology in 2002. He was awarded his Ph.D. for a thesis on “Micromachined CMOS compatible tunable capacitors” in June 2007. He has published over 50 papers in peer-reviewed journals and conferences. He serves on the steering committee of the Micromechanics Europe workshop series and is a regular reviewer with the Journal of Micromechanics and Microengineering. His research interests are in the field of MEMS device design and the integration of MEMS in real-world applications.
ICGEE is funded by:
