Microelectronics Technology (Integrated Circuit Technology)
The object of this course is to provide the student with an opportunity to fabricate a simple MOS integrated circuit and to learn about electrical and optical characterizations.
General information:
- Microelectronics Technology module is available in first & second semester 2011/2012 academic year (in October 2011 and in March 2012).
- Host Institution: Trinity College Dublin, Department of Electronic and Electrical Engineering
- Delivery mode:
- Intensive block delivery module, 3 days on-site workshop combined with lectures and laboratory work in Trinity College Dublin.
Course content:
- Processing techniques: The following techniques will be examined in some detail: crystal growth; diffusion; ion-implantation; oxidation; lithography; metallisation; plasma etching.
- Spectroscopy: Brief introductory material on application of Fourier Transform Infrared (FTIR) and Raman spectroscopy to IC technology will be presented.
- Devices/Circuits: Techniques for fabrication of the following devices, using the processing techniques described above, will be studied:
- Bipolar: discrete transistor; monolithic IC transistor; resistor; diode; capacitor; circuit layout for ECL NOR gate. MOS: PMOS, NMOS and CMOS technologies will be introduced and the problem of latch-up will be discussed.
- Silicon-on-Insulator will be proposed as an alternative to bulk silicon.
Microelectronics Technology - Module Descriptor
Lecturer: Dr. Tatiana Perova
Research Director
Microelectronics Technology Group
Trinity College Dublin
Tatiana Perova received her M.Sc. degree in Physics from the Tajik State University at Dushanbe (USSR). She completed her Ph.D. in Molecular Physics at Leningrad State University in 1979. Dr. Perova joined the staff of Vavilov State Optical Institute (St.-Petersburg, Russia) in 1979, where she was involved in the characterisation of condensed matter using far-infrared and Raman spectroscopy. In 1998, Dr. Perova took up the position of Research Director at the Department of Electronic & Electrical Engineering, University of Dublin, Trinity College, where she has since been involved in optical characterisation of liquid crystals and thin films formed on silicon. Dr. T.S. Perova has over 120 publications in the area of the optical characterisation of condensed matter.
ICGEE is funded by:
