International Centre for Graduate Education in Micro & Nano Engineering

Compound Semiconductor Device Fabrication

The objective of this course is to provide the student with an opportunity to fabricate a simple light emitting device and understand the technology involved.

General information:

1. Compound Semiconductor Device Fabrication module is available in second semester 2011/2012 academic year, from March 5^th to March 9^th, 2012
   
2. Host Institution: Tyndall National Institute, University College Cork
3. Delivery mode: Block delivery module, intensive five full days of the course on-site in Tyndall National Institute.

Course content:

• Processing techniques: The following techniques will be examined in some detail: photolithography, etching, metal deposition, thermal treatments and measurement.
• Devices & Circuits: Techniques for fabrication of the compound semiconductor devices, mainly light emitting devices such ad solid state lasers, LEDs etc.
• Device testing and relationship between device characteristics and process parameters.
• Silicon processing will be covered by highlighting some of the differences between III-V processing and silicon processing.  Technologies such as thermal oxidation and ion implantation will be covered in this section.

 Compound Semiconductor Device Fabrication - Module Descriptor

Find out more about Compound Semiconductor Fabrication Laboratories

Course Coordinators:

Brendan O'Neill

Head of Central Fabrication Facility
Tyndall National Institute
University College Cork

Started originally as silicon fabrication manager at what was then the NMRC in 1983. The job title and responsibilities changed through the years to the present incarnation as Head of Fabrication, this covers all of the fabrication activities at Tyndall, silicon, compound semiconductors, MEMS and E-Beam. I also act as Quality Management Representative with responsibility for the QMS which is ISO 9000 accredited.

Dr. Brian Corbett

Tyndall National Institute
University College Cork

 Dr Brian Corbett is a graduate of Trinity College Dublin in Experimental Physics and Mathematics. Following some time lecturing in Mathematics and Physics in the Institutes of Technology he joined Tyndall (NMRC). His research interests are in all aspects of lasers and LEDs made from III-V semiconductors and in how these devices can be useful for society.  He leads a team of 14 researchers at Tyndall. The research is funded by peer reviewed competitive research grants and by direct industry contracts.